Also known as electronic chemical materials, it refers to the fine chemical materials supporting the electronic industry. Electronic chemicals are a kind of special chemicals, which belong to the fine chemical industry in terms of the production process properties. In terms of product use, it belongs to the electronic material industry
Semiconductor manufacturing is to a large extent a chemically related process, with up to 20% of the process steps being cleaning and wafer surface treatment:
The chemical materials used in the manufacture of silicon wafers are commonly referred to as process chemicals, which come in different chemical forms (liquid and gas) and are strictly controlled for purity. The main functions of these process chemicals are as follows:
Clean the surface of silicon wafer with wet chemical solution and ultra-pure water;
P-type or N-type silicon materials were obtained by doping silicon wafers with high-energy ions.
Deposition of different metal conductor layers and necessary medium layers between conductor layers;
A thin SiO2 layer is formed as the main gate dielectric material of MOS devices.
Selective removal of materials, using plasma enhanced etching or wet process reagents, and the formation of the desired pattern on the film;
The grade of liquid high purity reagent is divided into UP-S, UP and EL according to its purity, and EL is further divided into:
The content of metal impurity in electronic grade 1 (EL-Ⅰ) is 100-1000 PPb, which is equivalent to SEMI C1 and C2 standard（High Purity Gallic Acid）.
The content of metal impurity in electronic grade 2 (EL-Ⅱ) is 10-100 PPb, which is equivalent to SEMI C7 standard.(Electronic Grade Gallic Acid)
The content of metal impurity in electronic grade 3 (EL-Ⅲ) is 1-10 PPb, which is equivalent to SEMI C7 standard.
The content of metal impurity in electronic grade 4 (EL-Ⅳ) is 0.1-1ppb, which is equivalent to SEMI C8 standard.
Post time: Feb-01-2023